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发明名称
FERROELECTRIC FET ELEMENT
摘要
申请公布号
JPH08274195(A)
申请公布日期
1996.10.18
申请号
JP19950073857
申请日期
1995.03.30
申请人
MITSUBISHI CHEM CORP
发明人
WATABE YUKIO
分类号
C01G3/00;C30B23/00;C30B29/22;H01L21/336;H01L21/8246;H01L21/8247;H01L27/10;H01L27/105;H01L29/786;H01L29/788;H01L29/792;(IPC1-7):H01L21/824
主分类号
C01G3/00
代理机构
代理人
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地址
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