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发明名称
Differentialdruck-Haltungssystem für CVD-Anlage
摘要
申请公布号
DE69118085(T2)
申请公布日期
1996.10.02
申请号
DE19916018085T
申请日期
1991.10.10
申请人
GENUS, INC., MT. VIEW, CALIF., US
发明人
SELBREDE, STEVEN C., SAN JOSE 95127, US
分类号
H01L21/205;C23C16/04;C23C16/44;C23C16/455;C23C16/458;H01L21/683;(IPC1-7):H01L21/00
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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