发明名称 LASER PLASMA X-RAY GENERATION DEVICE
摘要 PURPOSE: To increase the strength of an X-ray generated in a laser plasma x-ray generation device. CONSTITUTION: When the laser light 12 of a laser 11 is condensed by a condensing mirror 13 to irradiate a target 14 surface, plasma is generated in a target 14. Magnetic and electric fields are generated by magnetic and electric field generating means 15, 18, and 19 provided in the vicinity of the target 14, and an electron in the plasma is inhibited from proceeding straight to be closed in the vicinity of the target 14 to perform spiral movement. Consequently, since the electron is closed in the vicinity of the target 14, the flying distance of the electron is prolonged to increase the strength of an X-ray to improve the throughput of an applied device.
申请公布号 JPH08236292(A) 申请公布日期 1996.09.13
申请号 JP19950038113 申请日期 1995.02.27
申请人 HITACHI LTD 发明人 YAMANASHI HIROMASA;ITO MASAAKI;MATSUZAKA TAKASHI;OGAWA TARO
分类号 G21K5/02;G21K7/00;H01L21/027;H01S4/00;H05G2/00;H05H1/24;(IPC1-7):H05G2/00 主分类号 G21K5/02
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