| 摘要 |
PURPOSE: To provide a capacitive acceleration sensor in which an interval between electrodes can be accurately formed. CONSTITUTION: A capacitive acceleration sensor 1 comprises a silicon substrate 2 made of n<+> type silicon, and an n<-> type epitaxial silicon layer 3 formed on the upper surface of the substrate 2. A recess 4 is formed on the layer 3. A cantilever beam 5 made of the layer 3 is disposed in the recess 4. A block 6 of a substantially rectangular parallelepiped shape made of n<+> type silicon formed by diffusing an impurity is formed at the beam 5. A capacitor is formed from the substrate 2 as a fixed electrode and the block 6 as a movable electrode is formed. |
