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发明名称
ION ACCELREATOR
摘要
申请公布号
JPH08236058(A)
申请公布日期
1996.09.13
申请号
JP19950061866
申请日期
1995.02.23
申请人
NISSIN ELECTRIC CO LTD
发明人
SAITO YOSHINORI
分类号
C23C14/48;H01H35/00;H01J37/248;H01J37/317;H01L21/265;(IPC1-7):H01J37/248
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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