| 摘要 |
A polishing pad conditioner having an injection nozzle is provided to remove a slurry in grooves of a pad by injecting nitrogen gas into a conditioner head during a pad conditioning. A nitrogen gas injection nozzle(6) is installed within a conditioner head(10). The nitrogen gas injection nozzle is configured to pass through a rotational shaft(1) and a center of a dresser plate(2) to expose an injection hole(11) at a bottom surface, so that nitrogen gas is injected through the injection hole. The conditioner head performs a conditioning a polishing pas with a rotational motion and a reciprocal movement.
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