| 摘要 |
PURPOSE: To obtain stable laser output by preventing a decrease of output at the oscillation of high repetition rate in a high output pulse laser oscillator device. CONSTITUTION: A pair of major discharging electrodes 3 are provided facing each other along an optical axis inside a casing 1 that is filled with a laser gas. A laser light output windon 4 that to separate the inside of the laser device and the outside air and to output the laser light is provided in the casing 1. On the optical axis outside the laser device, an output mirror 6 that permeates a part of the leaser light and a total reflection mirror 7 are provided, and an optical resonator for laser oscillation is formed with the output mirror 6 and the total reflection mirror 7. An impact wave absorbing perforated plate 10 is provided between a major discharging space that comprises a pair of the major discharging electrodes 3 and the laser light output window 4. At the center of the impact wave absorbing perforated plate 10, a laser light passing hole is formed and many opening parts are formed around it. |
