| 摘要 |
PURPOSE: To alleviate temperature dependence and to improve detecting accuracy by providing the respective means of a variable electrode, vibration, vertical-displacement detection and vertical-displacement control, and detecting a yaw rate with the control amount of the variable electrode. CONSTITUTION: When a movable electrode 14 is vibrated in the horizontal direction and a yaw rate is applied on the electrode 14, the electrode 14 is displaced in the vertical direction with respect to a semiconductor substrate 11 by Coriolis force. The displacement is detected, and the displacement of the electrode 14 in the vertical direction is controlled into the direction where the displacement disappears. The interval between the electrode 14 and the substrate 11 is kept constant. At the same time, the yaw rate is detected with the amount of the control for controlling the displacement of the electrode 14 in the vertical direction. The feedback constitution, which keeps the constant interval between the electrode 14 and the substrate 11 with respect to the displacement of the electrode 14 in the vertical direction, is provided. The yaw rate is detected with the control amount. Thus, the highly accurate yaw-rate detection for decreasing the effect of temperature dependence can be performed by using the control amount by the feedback. |
