| 摘要 |
PURPOSE: To provide the apparatus for magnification observation with radiation having a high resolution. CONSTITUTION: The radiation emitted from a radiation source 20 is transmitted through a sample 27 and cast into a slant incident reflecting mirror 11. The incident radiation is magnified and the image is formed with the slant incident reflecting mirror 11. The image is impacted into a detecting means 21 and detected as the X ray image. A shielding plate 12 is arranged in approximately parallel with the surface at a position close to the emitting surface of the slant incident reflecting mirror 11. An opening 12a is provided at the region of a part of the surrounding part in the shielding plate 12. The X rays, which are reflected from a part of the reflecting surface of the slant incident reflecting mirror 11 passes the opening 12a and reaches the detecting means 21. Therefore, the part having the high machining accuracy among the reflecting surface of the slant incident reflecting mirror 11 is selectively used, and the X rays can be magnified and the image can be formed. The X-ray image having the high resolution can be detected with the detecting means 21. |
