| 摘要 |
PURPOSE:To provide a scanning probe microscope, which can be used in easy combination with a general-purpose optical microscope. CONSTITUTION:A simplified SPM apparatus 10 has a main unit 12, which is movably linked, a rotary moving unit 14 and a straight moving unit 16. A micrometer 18 is attached to the unit 12 through a slider mechanism 24. The tip of the shaft of the micrometer is linked to a holding mechanism 26, which is fixed :c to a stage 100 of an optical microscope. A micrometer 20 for moving the unit 12 is provided in the unit 14. A micrometer 22 for moving the unit 14 is provided in the unit 16. The unit 16 has two supporting legs 28, and holes 102 for accepting the legs are formed in the stage 100. An integrated type SPM sensor 46 is supported in the thin plate-shaped part of the unit 12 so that the sensor can be moved with a scanning mechanism 34.
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