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发明名称
FORMATION OF ELEMENT-ISOLATING AREA FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0831812(A)
申请公布日期
1996.02.02
申请号
JP19940164263
申请日期
1994.07.15
申请人
SONY CORP
发明人
TSUCHIYA YOSHIKO
分类号
H01L21/316;H01L21/027;H01L21/76;(IPC1-7):H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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