Dreiachsiger Beschleunigungsmesser

摘要

A pair of fixed plates (14, 24 or 54, 60) with a third plate (16 or 56) moveably mounted therebetween for sensing acceleration along a first axis (Z) through all three plates. Two of the plates (14, 16) also have fingers (30, 31, 32, 33 & 34) extending outwardly therefrom in two axes (X & Y) perpendicular to each other and to the first axis (Z). The plates and the fingers form capacitances therebetween which are used to produce signals indicative of acceleration along the three mutually orthogonal axes.