Method and apparatus for inspecting or testing a sample by optical metrology,申请号GB19950023973-传众专利搜索

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发明名称	Method and apparatus for inspecting or testing a sample by optical metrology
摘要
申请公布号	GB9523973(D0)	申请公布日期	1996.01.24
申请号	GB19950023973	申请日期	1995.11.23
申请人	BRITISH AEROSPACE PUBLIC LIMITED COMPANY	发明人
分类号	G01B9/02	主分类号	G01B9/02
代理机构		代理人
主权项
地址

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