发明名称 |
CONTACT CONNECTING METHOD |
摘要 |
The contact connecting method comprises the steps of forming an insulating separation oxide layer over a semiconductor substrate to forming an operation region and an insulating separation region and forming a contact hole greater than the operation region by using a photosensitive layer; ion-implanting impurity to the contact hole to form a first diffusion region; and depositing an interlayer insulating layer over the whole surface of the contact hole to form again a contact hole and depositing conductive material thereover.
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申请公布号 |
KR950014115(B1) |
申请公布日期 |
1995.11.21 |
申请号 |
KR19920019676 |
申请日期 |
1992.10.24 |
申请人 |
HYUNDAI ELECTRONICS INDUSTRIES CO., LTD. |
发明人 |
CHONG, IN - SUL;KIM, YNN - JANG |
分类号 |
H01L21/768;(IPC1-7):H01L21/768 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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