发明名称 CONTACT CONNECTING METHOD
摘要 The contact connecting method comprises the steps of forming an insulating separation oxide layer over a semiconductor substrate to forming an operation region and an insulating separation region and forming a contact hole greater than the operation region by using a photosensitive layer; ion-implanting impurity to the contact hole to form a first diffusion region; and depositing an interlayer insulating layer over the whole surface of the contact hole to form again a contact hole and depositing conductive material thereover.
申请公布号 KR950014115(B1) 申请公布日期 1995.11.21
申请号 KR19920019676 申请日期 1992.10.24
申请人 HYUNDAI ELECTRONICS INDUSTRIES CO., LTD. 发明人 CHONG, IN - SUL;KIM, YNN - JANG
分类号 H01L21/768;(IPC1-7):H01L21/768 主分类号 H01L21/768
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