| 摘要 |
<p>An integrated module with a heated reservoir (44) to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves (20, 22) and a proportioning pressure valve (21) for controlling the flow of the vapor from the reservoir (44) are mounted on the module (41A) for simple conduction heating of the valves. A capacitance manometer (19) also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistent performance and reliability are obtained.</p> |
