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发明名称
CATCH CUP COVER OF SPIN COATING APPARATUS
摘要
申请公布号
KR950006648(Y1)
申请公布日期
1995.08.16
申请号
KR19920016083U
申请日期
1992.08.26
申请人
HYUNDAI ELECTRONIC INDUSTRY CO., LTD.
发明人
SO, SUN - TONG;CHA, UI - YONG;SONG, JUN - HO;LEE, JAE - KU
分类号
H01L21/31;H01L21/312;(IPC1-7):H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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