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发明名称
SEMICONDUCTOR PRODUCTION EQUIPMENT
摘要
申请公布号
JPH07201801(A)
申请公布日期
1995.08.04
申请号
JP19930334241
申请日期
1993.12.28
申请人
HITACHI LTD;AKITA DENSHI KK
发明人
NAKAI TAKAFUMI
分类号
F26B21/00;H01L21/304;(IPC1-7):H01L21/304
主分类号
F26B21/00
代理机构
代理人
主权项
地址
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