发明名称 Photosensitive composition and resin-encapsulated semiconductor device.
摘要 <p>A photosensitive composition contains a polyimide constituted by a repeating unit having a hydroxyl group and a repeating unit having a siloxane bond, or a repeating unit having a hydroxyl group, a repeating unit having a siloxane bond, and a repeating unit other than these two repeating units, and a photosensitive agent consisting of an ester compound or an amide-ester compound of naphthoquinonediazidesulfonic acid or benzoquinonediazidesulfonic acid. The photosensitive composition is used as a passivation film of a semiconductor device or a photoresist. <IMAGE></p>
申请公布号 EP0431971(B1) 申请公布日期 1995.07.19
申请号 EP19900313342 申请日期 1990.12.07
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 HAYASE, RUMIKO, C/O INTELLECTUAL PROPERTY DIVISION;OBA, MASAYUKI, C/O INTELLECTUAL PROPERTY DIVISION;KIHARA, NAOKO, C/O INTELLECTUAL PROPERTY DIVISION;MIKOGAMI, YUKIHIRO, C/O INTELLECTUAL PROPERTY DIV.
分类号 G03F7/075;H01L21/312;H01L23/29;(IPC1-7):G03F7/075 主分类号 G03F7/075
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