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发明名称
PRODUCTION OF DIAMOND SUBSTRATE
摘要
申请公布号
JPH07172989(A)
申请公布日期
1995.07.11
申请号
JP19930319607
申请日期
1993.12.20
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
DEGUCHI MASAHIRO;KITAHATA MAKOTO;HIRAO TAKASHI
分类号
C30B29/04;H01L23/373;(IPC1-7):C30B29/04
主分类号
C30B29/04
代理机构
代理人
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