SEMICONDUCTOR RADIOACTIVE RAYS DETECTOR

摘要

PURPOSE:To prevent a window electrode from being corroded in the case of discriminating and measuring various alpha species involved in dust in a nitric acid vapor or alpha species in a uranium nitrate solution. CONSTITUTION:A depletion layer 6 is formed with a hetero junction of a semiconductor substrate 1 and an amorphous carbon film 2, and a window electrode 3 on the amorphous carbon film 2 is formed with a graphic film or an amorphous carbon film into which boron is doped, whereby there may be eliminated the use of a corrosive metal window electrode. Further surroundings of the window electrode 3 and an Al pad 5 to which a lead wire is connected are coated with the amorphous carbon film 7 for protection.