Method of and apparatus for fabrication of photovoltaic cell.

摘要

The present invention is intended to fabricate a photovoltaic cell which demonstrates high efficiency and low deterioration. The present invention is also intended to uniformly form this photovoltaic cell at a high speed on a large area without unevenness by a roll-to-roll method. A top cell of an i-type semiconductor layer is formed by an RF plasma CVD method and a middle cell and/or a bottom cell are formed by a microwave plasma CVD method. A top cell of an impurity-doped layer at an incident light side is formed by plasma doping and a middle cell and/or a bottom cell are formed by the RF plasma CVD method. The above-described objects are attained by providing film forming chambers respectively corresponding to the layers of a 2-layer or 3-layer tandem type photovoltaic cell and continuously forming semiconductor stacking films by a roll-to-roll method.