首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
Vorrichtung und Verfahren zur Lithographie mittels eines Strahls geladener Teilchen.
摘要
申请公布号
DE68920281(D1)
申请公布日期
1995.02.09
申请号
DE19896020281
申请日期
1989.10.26
申请人
FUJITSU LTD., KAWASAKI, KANAGAWA, JP
发明人
SAKAMOTO, KIICHI, TOSHIMA-KU TOKYO, 170, JP;YASUDA, HIROSHI, YOKOHAMA-SHI KANAGAWA, 222, JP;YAMADA, AKIO, KAWASAKI-SHI KANAGAWA, 213, JP
分类号
H01J37/317;(IPC1-7):H01J37/30;G03F7/20
主分类号
H01J37/317
代理机构
代理人
主权项
地址
您可能感兴趣的专利
STABLE AMORPHOUS COMPOSITION HAVING IMPROVED DISSOLUTION
VIBRATION TYPE GYROSCOPE
REMOVING CAP FOR RESIDUAL GAS IN AEROSOL CONTAINER
ELEVATOR OPERATION DEVICE
ELEVATOR CONTROL SYSTEM
MECHANISM TO PREVENT SUCTION TUBE FROM GETTING CLOGGED
WIPER DRIVING SIGNAL GENERATING DEVICE AND METHOD, AND VEHICLE
BACKLIGHT DETECTING DEVICE AND PHOTOGRAPHING DEVICE
POSITIVE TYPE RESIST COMPOSITION
IMAGE RECORDING MATERIAL AND POLYMER COMPOUND USED THEREFOR
HEAT SENSITIVE LITHOGRAPHIC PRINTING PLATE
PHOTOSENSITIVE RESIN FOR LIQUID CRYSTAL SPACER AND PHOTOSENSITIVE RESIN COMPOSITION
POSITIVE TYPE RESIST COMPOSITION
LIQUID CRYSTAL DISPLAY DEVICE AND ELECTRONIC INSTRUMENT
PHOTOMETRY AND PHOTOMETER
SEMITRANSMISSION TYPE LIQUID CRYSTAL DISPLAY DEVICE
EXHAUST EMISSION CONTROL DEVICE OF ENGINE
PTP SHEET PACKAGED ITEM
SLEWING CONTROL DEVICE
BELT STOPPER