WASHING METHOD AND WASHING DEVICE,申请号JP19930071776-传众专利搜索

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发明名称	WASHING METHOD AND WASHING DEVICE
摘要
申请公布号	JPH06283488(A)	申请公布日期	1994.10.07
申请号	JP19930071776	申请日期	1993.03.30
申请人	SUMITOMO HEAVY IND LTD	发明人	TAMAI TADAMOTO
分类号	B08B7/00;B08B3/10;H01L21/304;(IPC1-7):H01L21/304	主分类号	B08B7/00
代理机构		代理人
主权项
地址

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