| 摘要 |
PURPOSE:To provide a multi-functional sensor which can detect both the concentration of oxygen and the humidity at the same time. CONSTITUTION:The sensor is constituted of a first solid electrolyte plate 11 having oxygen ion conductive properties, a first cathode film 21b and a first anode film 21a formed on the surface of the plate 11, a spacer 5 surrounding the first cathode film 21b, a second solid electrolyte plate 12 disposed on the spacer 5 to confront the first solid electrolyte plate 11, and a second cathode film 22b and a second anode film 22a formed on the plate 12. Moreover, the sensor comprises a sealed space defined by being surrounded with a diaphragm of the spacer 5 and the first and second solid electrolyte plates 11, 12, and a diffusion path 4 connecting the sealed space with the outside space. |
