发明名称 |
Method and apparatus for measuring an interval between two objects |
摘要 |
A device for measuring an interval between two plate-like objects includes a light source for projecting a light toward the objects, a detector for detecting a position of incidence, upon a predetermined surface, of the light projected by the light source and deflected by the two objects, and a calculating portion for measuring the interval of the two objects on the basis of the detection by the detector.
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申请公布号 |
US5343291(A) |
申请公布日期 |
1994.08.30 |
申请号 |
US19920851109 |
申请日期 |
1992.03.16 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
OHWADA, MITSUTOSHI;MATSUGU, MASAKAZU;SUDA, SHIGEYUKI;YOSHII, MINORU;NIWA, YUKICHI;NOSE, NORIYUKI;SAITOH, KENJI;HASEGAWA, MASANOBU |
分类号 |
G03F9/00;(IPC1-7):G01B11/02 |
主分类号 |
G03F9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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