Press. sensor for ultra-high vacuum pressure container

摘要

The press. sensor contains a measurement element with a vibrator (4) and a mechanism for stimulating the vibrator and for detecting its vibration frequency which is a measure of the press. The vibrator (4) is made as part of a silicon plate (2) and is arranged at a small distance from a further plate to form a narrow gap (11) between them.The width of the gap varies as the plate vibrates. The silicon plate can be arranged between two further plates (1,3) which are electrically insulated wrt it. The mechanism for stimulating the vibrations and measuring the frequency applies electrical voltages to the further plates and/or measures voltages on them.