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发明名称
摘要
申请公布号
JPH0645340(U)
申请公布日期
1994.06.14
申请号
JP19920080515U
申请日期
1992.11.20
申请人
发明人
分类号
H01L21/60;H01L21/603
主分类号
H01L21/60
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代理人
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