| 发明名称 |
Gaseous feeding process, paricularly for diborane and silane. |
| 摘要 |
The diborane (B2H6) content in a mixture with silane (SiH4) is determined continuously by continuous measurement of the density by means of a vibrating tube densitometer (14) and subsequent determination of the B2H6 content. Application to the production of layers of glass based on boron, phosphate and silicate (borophosphosilicate glass). |
| 申请公布号 |
EP0599682(A1) |
申请公布日期 |
1994.06.01 |
| 申请号 |
EP19930402693 |
申请日期 |
1993.11.03 |
| 申请人 |
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE |
发明人 |
BRYSELBOUT, FRANCIS |
| 分类号 |
B01J4/02;B01J4/00;C01B33/04;C01B35/16;C03B37/014;C23C16/52;F17C13/02;G01N9/00 |
主分类号 |
B01J4/02 |
| 代理机构 |
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代理人 |
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