METHOD AND APPARATUS FOR ION MILLING,申请号JP19920306211-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR ION MILLING
摘要
申请公布号	JPH06129965(A)	申请公布日期	1994.05.13
申请号	JP19920306211	申请日期	1992.10.20
申请人	HITACHI LTD;HITACHI INSTR ENG CO LTD	发明人	SUMIYA HIROYUKI;TAMURA HIFUMI;IKEBE YOSHINORI;HIROSE HIROSHI
分类号	G01N1/32;(IPC1-7):G01N1/32	主分类号	G01N1/32
代理机构		代理人
主权项
地址

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