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发明名称
SEMICONDUCTOR PELLET BONDING DEVICE AND METHOD THEREOF
摘要
申请公布号
JPH06132327(A)
申请公布日期
1994.05.13
申请号
JP19920300662
申请日期
1992.10.14
申请人
TOSHIBA SEIKI KK
发明人
OKUYAMA YUTAKA
分类号
H01L21/52;(IPC1-7):H01L21/52
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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