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经营范围
发明名称
Plasma-Bearbeitungsgerät.
摘要
申请公布号
DE3887933(D1)
申请公布日期
1994.03.31
申请号
DE19883887933
申请日期
1988.07.05
申请人
KANEBO, LTD., TOKIO/TOKYO, JP
发明人
KONDO, YOSHIKAZU, HOFU CITY YAMAGUCHI PREF., JP;TSUDA, YUKIO, YOSHIKI-GUN YAMAGUCHI PREF., JP;YAMAMOTO, TOSHIHIRO, HOFU CITY YAMAGUCHI PREF., JP
分类号
B29C59/14;C23C16/54;D06M10/02;H01J37/32;(IPC1-7):H01J37/32;C23C14/56
主分类号
B29C59/14
代理机构
代理人
主权项
地址
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