| 摘要 |
PURPOSE: To detect a shearing force by an arrangement, wherein a probe chip in a scanning plane has resonance at a resonance frequency through an oscillation means and images the oscillatory variation optically. CONSTITUTION: The scanning microscope comprises a probe 10, and means 40, 50 for displacing the probe 10 with respect to a sample 30. The displacing means 40, 50 oscillate a probe chip 70, with respect to a surface at at least one oscillatory frequency. A scanning plane is substantially in parallel with a surface part to be scanned and when a shearing force is present, the oscillation amplitude is varied as the chip 70 approaches the surface of the sample 30, and the phase of oscillation with respect to a driving voltage is varied as the chip 70 approaches the surface. The amplitude and the phase are especially sensitive to a shearing force under a driving state close to the resonance. A light source 60 illuminates the probe chip 70, and a photodetector 80 for detecting position detects a light from the probe chip 70 and the displacement thereof. |
