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发明名称
VACUUM DEPOSITION DEVICE
摘要
申请公布号
JPH0633225(A)
申请公布日期
1994.02.08
申请号
JP19920193867
申请日期
1992.07.21
申请人
MURATA MFG CO LTD
发明人
KADOTA KOJI
分类号
C23C14/22;C23C14/24;H01L21/203;H01L21/285;(IPC1-7):C23C14/22
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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TYPEWRITER
