发明名称 Methods and means for full-surface interferometric testing of grazing incidence mirrors
摘要 The disclosed method and means measure the characteristics of an optical device by directing light waves by normal-incidence sub-aperture interferometry on the optical device, shear-polarizing the light directed onto the optical device, and analyzing the results of the interference to obtain the characteristics of the optical device
申请公布号 US5282015(A) 申请公布日期 1994.01.25
申请号 US19910704985 申请日期 1991.05.24
申请人 QUANTAMETRICS INC. 发明人 REMO, JOHN L.
分类号 G01B9/02;G01B11/255;G01M11/00;G03F7/20;(IPC1-7):G01B9/02 主分类号 G01B9/02
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