| 摘要 |
<p>A precision microactuator (30) fabricated from a single crystal of silicon for mechanically moving microstructures (10) having a beam (12) with a longitudinal axis and a first fixed end (14) and a second remote end, there being at least one pair of opposed capacitor plates (40, 42) in the beam dividing the beam into relatively movable axially aligned, longitudinal segments (12', 12', and 12'''), and electrical connections (70) for applying an electric potential across the plates to cause the relatively movable segments to move with respect to each other to cause the remote end of the beam to move along the longitudinal axis with respect to the fixed end to vary the length of the beam.</p> |
