Verfahren zum Entfernen von Teilen aus Siliciumnitrid oder Siliciumoxynitrid.,申请号DE19883880029T-传众专利搜索

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发明名称	Verfahren zum Entfernen von Teilen aus Siliciumnitrid oder Siliciumoxynitrid.
摘要
申请公布号	DE3880029(T2)	申请公布日期	1993.10.21
申请号	DE19883880029T	申请日期	1988.06.24
申请人	FRANCE TELECOM, PARIS, FR	发明人	STRABONI, ALAIN, F-38400 ST MARTIN, FR;BERENGUER, MARC, F-38420 REVEL, FR;VUILLERMOZ, BERNARD, F-3800 GRENOBLE, FR
分类号	H01L21/314;H01L21/316;H01L21/32;H01L21/762;(IPC1-7):H01L21/311;H01L21/76	主分类号	H01L21/314
代理机构		代理人
主权项
地址

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