| 摘要 |
PURPOSE:To conform the center of an ion beam to the central position of a sample in an electron microscope device and momentarily detect the distributing state of the ion beam current. CONSTITUTION:The ion beam guided to a charged particle emitting device having a sample holder having a plurality of Faraday cups arranged adjacent to a sample position is emitted to the Faraday cups, and the control power source of an ion beam emitting device is so controlled that the distribution of the ion beam current detected by the Faraday cups can be desired distribution values, and the ion beam distributing state is confirmed and detected. The sample holder is then moved to set the sample in the ion beam distribution equal position, and the sample is irradiated with the ion beam. The sample holder is set in the position where the beam is passed through a beam pass hole provided on the bottom part of one of the Faraday cups, and various power source voltages are regulated so that the distributions of the ion beam current detected by the Faraday cups are nearly equal to each other in this state.
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