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发明名称
ETCHING SOLUTION FOR WET PROCESSES IN SEMICONDUCTEUR FABRICATION
摘要
申请公布号
EP0499830(A3)
申请公布日期
1993.08.25
申请号
EP19920101207
申请日期
1992.01.25
申请人
RIEDEL-DE HAEN AKTIENGESELLSCHAFT
发明人
LEIFELS, JOACHIM;SIEVERT, WOLFGANG, DR.
分类号
H01L21/308;H01L21/306;H01L21/311;(IPC1-7):H01L21/311
主分类号
H01L21/308
代理机构
代理人
主权项
地址
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