LASER BEAM SCANNER AND ITS FABRICATING METHOD

摘要

LASER BEAM SCANNER AND ITS FABRICATING METHOD There is provided a laser beam scanner comprising a beam source for generating a semiconductor laser beam; a rotary hologram for diffracting the semiconductor laser beam to form a scanning beam on a surface to be scanned; and an aberration correcting stationary hologram disposed between the beam source and the rotary hologram, wherein the stationary hologram is constructed with an object wave and a reference wave being interfered on a stationary hologram substrate subject that an aberration of the scanning beam on the surface to be scanned shall be corrected, the object wave being a spherical wave having an aberration, a wavelength shorter than that of the semiconductor laser beam, and an incident angle which is not vertical but inclined with respect to the stationary hologram substrate.