| 摘要 |
PURPOSE:To form a microlens keeping such an excellent shape as to ensure a high degree of light convergence and having satisfactory transparency by using a compsn. contg. a specified polymer, a compd. having a quinonediazido group and a thermosetting resin or further contg. a specified triazine compd. CONSTITUTION:This positive type photoresist compsn. contains a hydroxystyrene-methyl methacrylate copolymer (A), a compd. (B) having a quinonediazido group and a thermosetting resin (C) or further contains a triazine compd. represented by the formula (where Z is a 4-alkoxyphenyl group or a group formed by condensing a benzene ring to the alkoxyphenyl group). The amt. of the component B used is 10-30 pts.wt., preferably 15-25 pts.wt. per 100 pts.wt. of the component A, that of the component C is 1-20 pts.wt., preferably 2-12 pts.wt. and that of the component D is 0.5-5 pts.wt., preferably 0.8-3 pts.wt. |
