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发明名称
FORMATION OF METAL FILM
摘要
申请公布号
JPH05140732(A)
申请公布日期
1993.06.08
申请号
JP19910306344
申请日期
1991.11.21
申请人
ISHIKAWAJIMA HARIMA HEAVY IND CO LTD
发明人
SHIMOYAMA TOSHIYUKI
分类号
C23C14/20;C23C14/22
主分类号
C23C14/20
代理机构
代理人
主权项
地址
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