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发明名称
VERTICAL SEMICONDUCTOR HEAT TREATMENT DEVICE
摘要
申请公布号
JPH0547686(A)
申请公布日期
1993.02.26
申请号
JP19910206635
申请日期
1991.08.19
申请人
TOSHIBA CORP
发明人
TONAMI YOUSUKE
分类号
H01L21/22;H01L21/31;H01L21/324
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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