| 摘要 |
PURPOSE:To obtain the photosensitive resin composition high in sensitivity to visible light, especially, argon laser beams, and in resolution and superior in storage stability by using a specified compound and a p-aminobenzylidene derivative and the like. CONSTITUTION:This photosensitive resin composition comprises an alkali-soluble phenol resin, a compound of formula I to be allowed to restrain dissolution in alkali by mixing with the phenol, a diaryliodonium salt to be allowed to produce an acid, and the p-N-dialkylaminobenzylidene derivative of formula II having a function of spectrally sensitizing photodecomposition of the diaryliodonium salt. In formulae I and II, R is t-butyl or tetrahydropyranyl; n is 1-4; each of R1 and R2 is lower alkyl; X is H or alkoxycarbonyl or the like: Y is acyl or residual group from alkoxycarbonyl: and n is 0 or 1. |
