| 摘要 |
PURPOSE:To obtain a scanning tunnel microscope provided with a moving mechanism capable of operating normally even in the ultrahigh vacuum by providing means for heating a unit stage having grooves where an inch worm moves. CONSTITUTION:After a gap between blocks 21, 22 and a wall 12 of a scanning tunnel microscope unit is adjusted to be 10mum, baking is conducted at 150 deg.C. Then, the microscope unit is cooled to the room temperatures 25 deg.C. In this case, since it takes place in some cases that the unit is not uniformly cooled, leaving no gap between the blocks 21, 22 and the wall 12 at all, the temperature of the side walls 12, 13 are prevented from being lowered and kept the same as that of the blocks 21, 22. More specifically, a current is supplied to a heater 31 to raise the temperature, thereby heating and expanding a unit stage 11. As a result, the width of the groove is increased, making an inch worm movable. The heater 31 is controlled by a control device based on the temperature of the unit stage 11 measured by a thermocouple 32. |
