MANUFACTURE OF SILICON THIN FILM,申请号JP19910146479-传众专利搜索

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发明名称	MANUFACTURE OF SILICON THIN FILM
摘要
申请公布号	JPH04324627(A)	申请公布日期	1992.11.13
申请号	JP19910146479	申请日期	1991.04.24
申请人	NIPPON STEEL CORP	发明人	TAKEUCHI HIDEKI
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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