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发明名称
POLISHING METHOD AND DEVICE
摘要
申请公布号
JPH04244373(A)
申请公布日期
1992.09.01
申请号
JP19910009843
申请日期
1991.01.30
申请人
HITACHI LTD
发明人
UCHIDA FUMIHIKO;SHIMANO TAKESHI;MURAOKA KOJI;ARIMOTO AKIRA;YAMAOKA SHOSAKU
分类号
B24B49/16
主分类号
B24B49/16
代理机构
代理人
主权项
地址
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