AUTOMATIC TRANSFER SYSTEM FOR SEMICONDUCTOR,申请号JP19910005501-传众专利搜索

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发明名称	AUTOMATIC TRANSFER SYSTEM FOR SEMICONDUCTOR
摘要
申请公布号	JPH04237147(A)	申请公布日期	1992.08.25
申请号	JP19910005501	申请日期	1991.01.22
申请人	NEC CORP	发明人	HIROSE KOJI
分类号	B65G57/00;H01L21/677;H01L21/68	主分类号	B65G57/00
代理机构		代理人
主权项
地址

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