| 摘要 |
PURPOSE:To accurately detect a minute flaw part by image processing even when a surface to be inspected is widely irradiated with light by iradiating the surface to be inspected with light having luminous intensity distribution set so that luminous intensity gradually changes so as to be reduced along a predetermined direction. CONSTITUTION:The light irradiation mechanism 23 arranged in opposed relation to a surface 27 to be inspected as a mirror surface irradiates the surface 27 to be inspected with light having luminous intensity distribution set so that luminous intensity gradually changes so as to reduce along a predetermined direction. Next, a camera 24 takes the image of the light irradiation mechanism 23 reflected from the surface 27 to be inspected to form a light detection image having the light and darkness corresponding to the luminous intensity distribution of the light irradiation mechanism 23. Subsequently, an image processor 33 discriminates a place largely different from the circumference in brightness in the respective light and darkness parts of the image to detect the flaw region 12 of the surface 27 to be inspected. By this constitution, even when the surface to be inspected is widely irradiated with light, a minute flaw part can be detected by image processing. |
