CHEMICAL DRY ETCHING DEVICE,申请号JP19900403965-传众专利搜索

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发明名称	CHEMICAL DRY ETCHING DEVICE
摘要
申请公布号	JPH04219930(A)	申请公布日期	1992.08.11
申请号	JP19900403965	申请日期	1990.12.20
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	OKAFUJI MICHIKO;ISHIHARA SHINICHIRO;TAKEDA YOSHIYA
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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