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发明名称
METHOD AND APPARATUS FOR IRRADIATING LOW-ENERGY ELECTRONS
摘要
申请公布号
US5138169(A)
申请公布日期
1992.08.11
申请号
US19910735532
申请日期
1991.07.26
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
YAMAZAKI, YUICHIRO;MIYOSHI, MOTOSUKE;OKUMURA, KATSUYA
分类号
G21K5/04;H01J37/02;H01J37/05;H01J37/073;H01J37/252;H01J37/30;H01J37/317;H01J49/08
主分类号
G21K5/04
代理机构
代理人
主权项
地址
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